Integrated Nanoscale Characterization
SPM measurements coupled with SEM measurements are now possible for the first time with the award-winning technology offered by Nanonics. A revolutionary design of the SPM system provides open access to SEM/FIB beams enables seamless integration of an SPM/NSOM system into an SEM/FIB. The SPM probe does not obscure the electronic or ion beam axis and also sits at the eucentric point. Furthermore, simultaneous SPM and NSOM cathodoluminescence measurements are also possible for high resolution, spatially resolved characterization.