3D FlatScanTM

Ultra-thin Piezoelectric Scanning Stage




The Nanonics 3D FlatScan novel planar and flexure design allows for the ultimate in high resolution scanning and accurate nanoscale positioning. The scanner incorporates an award winning technology of four piezo elements which provide large X, Y and Z piezo displacement of up to 85 micron fine motion and 5mm of coarse motion.

3D FlatScan stages are optimized for scanning probe microscopy (SPM) systems, and can easily be upgraded to the Nanonics SPM /NSOM systems. The flexible geometrical design of the scanner includes a 7mm thickness, small XY footprint and a 24cm central opening that provides an ideal scanning platform for a variety of integration possibilities such as optical microscopes,

Fluorescence and Confocal microscopes, Raman microscopes, probe station environmental and vacuum chambers.

Nanonics 3D FlatScanTM piezo scanning stage


High Resolution


  • Optimized for SPM imaging and nano-manipulation protocols such as nano-lithography
  • Scanning ranges of up to 85µm in X, Y and Z
  • Three operational modes: scanning, positioning & scanning and manual positioning
  • Fine and  coarse positioning via inertial motion based piezo (requires Nanonics NWS software)



Optical Integration


  • Clear optical access from above and below the sample
  • Integration with any Upright, Inverted and Dual Upright/Inverted optical microscopes
  • Integration with variety of Fluorescence, Confocal and Raman optical microscopes


Nanonics 3D FlatScan stages have been designed from the ground up for optical ,spectroscopic and other online integrations. The 3D FlatScan incorporates innovative technologies which allow for free optical access from above and below without any obstructions enabling integration with any standard optical microscope including Upright, Inverted and Dual configurations.  These stages further can accommodate any configuration of these microscopes including powerful objectives of large numerical apertures and low working distances such as water immersion and oil immersion objectives.  This integration extends to many advanced optical techniques such as NSOM, NSOM-Fluorescence, DIC, Raman, TERS, epi-fluorescence, confocal laser scanning confocal microscopy, TIRF, FCS, STED, SHG, FRAP and FRET 





  • Complete controller system for scanning and positioning
    • High voltage amplifier (Piezo Driver)
    • ADC/DAC Module (DT Interface what is DT)
    • PC with Data Acquisition Card
    • Power Supply
  • Complete access to all scanning signals through BNC ports
  • 8 analog inputs for scan synchronization with external devices
  • 4 digital  Inputs/Outputs suitable for triggering and synchronization with external devices
  • Provides low voltage bias of +/-10V with control through NWS software
  • Smaller version of High Voltage for manual driving of the scanner is also available



  • LabView based software with variety of protocols for scanning and positioning
  • Scanning of up to 16 channels simultaneously
  • Intuitive interface with control of scan parameters such as scan range, number of pixels, time per pixel, calibration, offsets, etc.
  • Includes two modes for basic and advanced users
  • Advanced options for user scripting of various functions such as bias control, I-V spectroscopy, positioning and manipulation, etc.
  • Advanced capabilities of image processing
  • ScanControl module: A built-in module for managing and sending triggers for synchronization with external devices such as detectors, CCDs, spectrometers, lasers, etc.
  • The software includes ready-to-use protocols for synchronization with variety of spectrometers from different manufacturers such as Andror, HORIBA, Renishaw, BaySpec, and more.




  • Scanning Stage
    • Piezo based flat scanning stage with central opening suitable for integration with optical microscopes with clear optical access from above and below
  • Scanning Modes
    • Sample scanning
    • Optional: Upgrade to Tip-Scanning
  • Scanning Range - Up to 85 microns in XY
    • Up to 85 microns in Z
    • Smaller scanners are available
  • Scanner Resolution
    • X & Y: 0.005nm, Z : 0.002nm
  • Z Imaging Noise (for AFM)
  • Sample Size
    • Up to 100mm in XY and 30m in Z
    • Large samples with exotic geometries for cross section scans
    • Suitable for liquid cell samples
  • Sample Weight
    • Up to 70 gr.
  • Sample Positioning
    • Coarse:  5-6 mm XY positioning through Piezo Inertial Motion with control through Nanonics NWS software and <1 micron positioning accuracy
    • Fine: 85 micron XYZ positioning through Piezo offsets with accuracy of <1nm
  • Optical Viewing
    • Clear optical access from above and below the sample without obstruction
    • Suitable for integration with optical microscopes with high magnification objectives such as 100x, water and oil immersion objectives
  • Controller
    • ADCs/DACs in 16 bit (18 bit optional)
    • X, Y, & Z High Voltage Amplifiers, Voltage output of ± 150v, 4 voltage display channels, Hardware slop compensation
    • 4 Digital inputs and outputs
    • 8 Analog inputs and outputs
  • Software
    • LabView based Software
    • Intuitive scan parameter setup
    • Real time processing of tilt removal and line normalization
    • Imaging and displaying 16 simultaneous channels
    • Zoom-in and offset scans
    • Inertial motion software interface for sample positioning
    • Z stepper motor interface for tip-sample approach
    • Extensive image processing options
    • Import data as Windows bitmaps and ACSII. Export data as TIFF and Windows bitmaps and ACSII
  • ScanControl Module
    • Built-in module allows user to actively control the AFM scan for integration and synchronization with external instrumentation (such as Raman spectrometers, pulsed lasers, etc.)
    • Easy and intuitive graphical interface for specifying measurement points
    • Possibility of taking extra ADC measurements during scan
    • Possibility of sending triggers to external hardware during scan
    • Possibility of running a user-defined Labview vi, allowing the user to perform any action or calculation during the scan
  • Upgrade
    • Upgradable to AFM, NSOM, AFM/Raman, MultiProbe systems