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AFM and Reflection NSOM of SRAM
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| 4 X 4 micron AFM image of SRAM showing a topographic relief of the surface |
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The simultaneous NSOM image obtained in reflection mode shows the structure underneath the silicon layer |
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device structure
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These Images were produced using the The MultiView 1000™.
This is the only system available today which can produce reflection NSOM in the intermittent contact mode.
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