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Materials and Surface Nanoscience
Online AFM/Raman of an Si/SiO2 Grid
AFM/Raman of Cardiac Stent
Topographic Images of the Fisher's Sample
Collage of Raman Intensity & AFM Topography of a Diamond Film
Raman Imaging with AFM Auto-Focus
AFM Phase Images of TMP Sample
Raman/AFM Depth Profiling of a Polymer Blend/PDMS/Chloroform
NanoIndentation and Raman Characterization
AFM with On-Line Raman of Strained Silicon
AFM/Raman Collage of Name Card
AFM/Thermal in Non-Contact Mode
Topographic Imaging of Silver Nanoparticles
AFM Raman of CNT Nanowire on Silicon
MultiProbe NanoIndentation & AFM Profiling with On-line Raman
AFM/Raman of Strained Si Transistor
Large Z-Range Imaging of Razor Blade
Off-Axis Enhancement
Quantum Dots Imaging
Quantum Dots Imaging
AFM/Raman of Si/SiO2 Grid
Diamond Film Raman with AFM On-Line Auto-Focus
Grain Boundary Imaging in HOPG
AFM Imaging of Textile Fibers
Optoelectronic Device Structure
HOPG
Carbon Nanotubes
Wood Sample
Nanoindentation
FIB Etched Trench
0.5x0.5µ Carbon Nanotubes
PEO Spherulite
Raman-AFM of MEMs device
TFT in Liquid Crystal Display
Magneto Optic Disc
AFM, NSOM and Capicatance
30nm Gold Balls
Internal Imaging of a Deep Trench
Alumina Template
Image of Standard Silicon AFM Tip
Deep Trench / Side-Wall Imaging
Zoom on Carbon Nanotube
Simultaneous AFM/NSOM and Capacitance
Carbon Nanotubes
Topographic Imaging of Silver Nanoparticles
Quantum Dots Imaging




SEM/AFM Integration
Integrated SEM and AFM Imaging
 

SEM images of a Nanonics AFM Non-obscuring Probe


 

Probe in contact with a sample inside the vacuum chamber of the SEM.
Magnification: 120X (top) and 1000X (bottom).
The sample is a patterned GaN sample with a line spacing of 10microns.

 
The Scanning Electron Microscope (SEM) has difficulty obtaining information on a variety of samples. One such situation is the case of a trench in a semiconductor wafer in which a SEM cannot view the bottom or the sidewall of the trench structure.

Using the unique AFM capabilities of the MultiView 400™  The operator of a SEM or FIB machine can ask, on line, questions about high aspect ratio structures (eg. side wall angles and the surface structure of these sidewall in a variety of important devices with vias and other structures.

 
A Nanonics MultiView 400™ head inside the chamber of a SEM chamber

Imaging a deep trench such as the one opposite is impossible with standard silicon AFM tips. The Nanonics deep trench probes together with the large scan range of the 3D FlatScan ™ makes these images possible for the first time.		  

10 x 10 micron AFM image of a 10 micron deep/2 micron wide trench (Z-range 10 micron)

     
The bottom of a deep trench    


Nanonics deep trench probes make it possible to form images from the bottom of a deep trench of up to 1.5mm.
 

1 x 1 micron AFM image of the bottom of the deep trench (Z-range 100 nm)

     
Side wall image    


Only the Nanonics 3D FlatScan ™ is able to scan in the X-Z plane to image features on the side of a deep trench
 

5 x 5 micron X-Z scan of the sidewall of the deep trench (Y-range 150 nm)



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