Local Stress of MEMs Devices
Using Integrated Raman-AFM
The images below show a transparent Nanonics AFM probe applying stess to different positions on a MEMs device. The Raman Shift for each location was recorded and is presented below.
Only Nanonics combined Raman and AFM system allows Raman spectra to be taken while an AFM tip is in contact with the sample.
Raman Shift as a Function of Local Stress Location
|
|
|
For this measurement the cantilevered glass AFM probe with a tip diameter 1.5 microns was brought into contact with the sample using the MultiView 400™ SPM system. The Raman shift was measured at one central point of the structure, while the pressure was applied and removed at a variety of points. The pressure was changed using feedback control of the SPM system. The series of images above shows the probe location and the central point (cross), where the Raman shift was measured.
The Nanonics MultiView 400™ system can be directly integrated into the Renishaw RM Series Raman Microscope. These microscopes employ the upright microscope configuration, and the Nanonics MultiView 400™ has a free optical axis which allows it to be readily placed on the sample stage of such a microscope (see picture). |
|
 |
| The MultiView 400™ Integrated with a standard Raman Microscope |
|
The Nanonics patented cantilevered optical fibers are held between the microscope lens and the sample without obstructing any aspect of the far-field optics. The tip in these fibers is exposed and is illuminated by the lens of the microscope, allowing the user to view the exact region where the SPM and Raman information is being collected.
Only Nanonics combined Raman and AFM system allows Raman spectra to be taken while an AFM tip is in contact with the sample.
|
