3D Flatscanner Technology for SPM

Scanning and Positioning Piezo Stage

The Nanonics 3D FlatScan novel planar, folded piezo and flexure design allows for the ultimate in high resolution scanning and accurate nanoscale positioning. The scanner incorporates an award winning technology of four piezo elements which provide large X, Y and Z piezo displacement of up to 100 micron fine motion and 5mm of coarse motion.

3D FlatScan stages are optimized for scanning probe microscopy (SPM) system can easily be upgraded to the Nanonics SPM /NSOM systems.

 The flexible geometrical design of the scanner includes a 7mm thickness, small XY footprint and a 24cm  central opening that provides an ideal scanning platform for a  variety of integration possibilities such as optical microscopes, Fluorescence and Confocal microscopes, Raman microscopes, probe station environmental and vacuum chambers, etc.


  • Optimizedfor SPM imaging and nanomanipulation protocols such as nanopositioning and Nanolithography
  • Scanning ranges of up to 100µm in X, Y and Z
  • Three operational  modes of scanning, positioning and  combined scanning & positioning
  • Fine(100um) and  coarse (5mm) positioning via inertial motion based piezo (requires Nanonics NWS software)



Key Features

 High resolution scanning and nanoscale positioning piezo stages

    • Optimized for SPM imaging and nanomanipulation protocols such as nanopositioning and nanolithography

    • Scanning ranges of up to 100µm in X, Y and Z

    • Three operational  modes of scanning, positioning and  combined scanning & positioning

    • Fine(100um) and  coarse (5mm) positioning via inertial motion based piezo (requires Nanonics NWS software)
    • Cmpletely free optical integration with access to the sample from aove and below

3D FlatScanTM piezo stage                                      

3D FlatScanTM  top view with central opening of 24mm                                                   

Imaging single and multiple atomic steps of HOPG sample using 3D FlatScanTM incorporated in Nanonics MultiView SPM systems

Nanolitography of protein manipulation using  3D FlatScanTM nanopositioning capabilities using Nanonics SPM systems.


Optical Integration


Clear Optical Access for Optical Integration

Nanonics 3D FlatScan stages have been designed from the ground up for optical ,spectroscopic and other online integrations. The 3D FlatScan incorporates innovative technologies which allow for free optical access from above and below without any obstructions enabling integration withany standard optical microscope including Upright, Inverted and Dual configurations.  These stages further can accommodate any configuration of these microscopes including powerful objectives of large numerical apertures and low working distances such as water immersion and oil immersion objectives.  This integration extends to many advanced optical techniques such as NSOM, NSOM-Fluorescence, DIC, Raman, TERS, epi-fluorescence, confocal laser scanning confocal microscopy, TIRF, FCS, STED, SHG, FRAP and FRET microscopies

FlatScan Stage offers a thin and flat geometry with afriendly footprint and clear optical access from above and below.                                  


3D FlatScan stage mounted on a Dual microscope of standard Upright and Inverted optical microscopes.                                                          

3D FlatScan stage integrated with Raman microscope for confocal Raman  Microscopy                                                             

3D Confocal Raman images of a 1461cm-1 band of a polymer mesa performed with 3D FlatScan stage                                    



 Hardware Electronics with Complete User Access


  • Complete Controller system for scanning and positioning
    • High voltage amplifier (Piezo Driver)
    • ADC/DAC Module
    • PC with Data Acquisition Card
    • Power supply unit
  • Complete access to all scanning signals through BNC ports
  • 8 analog iputs for scan sunchronization with external devices
  • 4 digital Inputs/outputs suitable for triggering and synchronization with external devices
  • Provides low voltage bias of +/- 10V with control through NWS software
  • Option of basic controller of High voltage for manual driving of the scanner


Four channel High Voltage Piezo Driver                                 


ADC/DAC module with user complete access                                         

PC and data acquisition card  with NWS  software                                              

Power Supply unit for high and low voltage  outputs                                



Nanonics NWS Software to interface with FlatScan Stage


    • LabView based software with variety of protocols for scanning and positioning

    • Scanning of up to 16 channels simultaneously

    • Intuitive interface with control of scan parameters such as scan range, number of pixels, time per pixel, calibration, offsets, etc.

    • Includes two operation modes for basic and advanced users

    • Advanced options for user scripting of various functions such as bias control, I-V spectroscopy, positioning and manipulation, etc.

    • Advanced capabilities of image processing

    • ScanControl module: A built-in module for managing and sending triggers for synchronization with external devices such as detectors, CCDs, spectrometers, lasers, etc.

    • The software includes ready-to-use protocols for synchronization with variety of spectrometers from different manufacturers such as Andror, HORIBA, Renishaw, BaySpec, and more.


Nanonics NWS LabView based software with interactive user

interface for scanning and positioning. Up to 16 channels

can be acquired

     ScanControl software module to manage and optimize triggers

for customized synchronization with external devices





    • Scanning Stage

      •  Piezo based flat scanning stage with central opening suitable for integration with optical microscopes with clear optical access from above and below

    • Scanning Modes

      • Sample scanning

      •  Optional: Upgrade to Tip-Scanning

    • Scanning Range - Up to 100 microns in XY

      • Up to 85 microns in Z

      • Smaller scanners are available

    • Scanner Resolution

      •  X and Y: 0.005nm, Z : 0.002nm

    • Z Imaging Noise (for AFM)

      •  0.05nm rms/ 0.2nm p-p obtained with AFM imaging of HOPG sample with atomic steps

    • Sample Size

      • Up to 100mm in XY and 30mm in Z Large samples with exotic geometries including hanging positioningfor cross section scans

      • Suitable for liquid cell samples

    • Sample Weight

      • Up to 70 gr.

    • Sample Positioning

      • Coarse:  5-6 mm XY positioning through Piezo Inertial Motion with control through Nanonics NWS software and <1 micron positioning accuracy

      • Fine: 100 micron XYZ positioning through Piezo offsets with accuracy of <1nm

    • Optical Viewing

      • -Clear optical access from above and below the sample without obstruction

      • Suitable for integration with optical microscopes with high magnification objectives such as 100x, water and oil immersion objectives

    • Controller

      •   ADCs/DACs in 16 bit (18 bit optional)

      • X, Y, & Z High Voltage Amplifiers, Voltage output of ± 150v, 4 voltage display channels, Hardware slop compensation

      • 4 Digital inputs and outputs

      •  8 Analog inputs and outputs

    • Software

      • LabView based Software

      • Intuitive scan parameter setup

      • Real time processing of tilt removal and line normalization

      • Imaging and displaying 16 simultaneous channels

      • Zoom-in and offset scans

      • Inertial motion software interface for sample positioning

      • Z stepper motor interface for tip-sample approach

      • Extensive image processing options

      • Import data as Windows bitmaps and ACSII. Export data as TIFF and Windows bitmaps and ACSII

    • ScanControl Module

      • Built-in module allows user to actively control the AFM scan for integration and synchronization with external instrumentation (such as Raman spectrometers, pulsed lasers, etc.)

      • Easy and intuitive graphical interface for specifying measurement points

      • Possibility of taking extra ADC measurements during scan

      • Possibility of sending triggers to external hardware during scan

      • Possibility of running a user-defined Labview vi, allowing the user to perform any action or calculation during the scan

    • Upgrade

      • Upgradable to AFM, NSOM, AFM/Raman, MultiProbe systems




Do you have a question about a product?

Are you interested in a quote?

We can help!



Let's set up a time to speak briefly about your unique SPM needs.

Thanks for visiting!


Just before you go...


Would you like to take a quick look at how you can improve your research or industrial application?