Figure 1: AFM topographic image (upper left) of an Si/SiO2 grid and correlating online Raman image (upper right) mapping the Si 520cm-1 band.

A 532nm laser was used for excitation with a time exposure of one second per point.

A 3D collage image is presented (lower left) showing the Raman intensity overlapping the surface topography.

WSxM software has been used for image processing of the pictures above: I. Horcas et al. Rev. Sci. Instrum. 78, 013705 (2007).