Breakthrough in TuningFork Feedback High resonant frequencies High Q factors

Tuning forks were pioneered in scanned probe microscopy by K. Karrai and M. Haines, US Patent Number 5,641,896. The work of Karrai and coworkers as patented were for straight near-field optical/AFM elements with highly restricted geometries of tip attachment and movement. Nanonics extends this technology in two directions: first, the use of proprietary, simple mounting techniques that maintain resonance frequencies and Q factors and resolve problems with tuning fork feedback as noted previously [D. N. Davydov, K. B. Shelimov, T. L. Haslett and M. Moskovits, Appl. Phys. Lett. 75, 1796 (1999)]. Second, applying these mounting techniques to cantilevered near-field optical and AFM elements to provide performance at the limits attainable with scanned probe techniques.

Mechanical Design and Scanning

• Double the z scanning breakthrough achieved with one 3D Flat Scanner™ in the MultiView 1000™
• Up to 0.120 mm z scanning for ease of approach
• Samples with surface roughness from nanometers to over one hundred microns
• Hundreds of microns deep imaging with Nanonics Deep Trench Probes™ and 3D Flat Scanning™
• Complete integration with confocal microscopic 3D optical sectioning
• Laser tweezers applications
• Roughly scan samples for millimeters in x-y
• Double the conventional x-y fine motion with two scanning stages: one for the tip and one for the sample
• Extreme compactness and closed-loop mechanical design for sample stability
  Noise floor <1 nm
• Flexible mounting geometries for all near-field optical elements 

Clockwise from left: An open MultiView 2000™ head, A Fibril of Associated Protein Molecules imaged by Soft Sample Imaging, The closed MultiView 2000™ head.

Sample Scanning

Closed Loop Option With the inclusion of embedded closed loop sensors, The Nanonics 3D Flat Scanner can return the sample (or tip during tip scanning) to a precise spot with an accuracy of 20 nm. This is unaffected by hysteresis, creep, non-linearity or aging of the piezoceramic. Therefore The Nanonics 3D Flat Scanner with closed loop sensors can perform linearization of the scanner both on-line and off-line during a scan. With the addition of a third z-axis sensor The Nanonics 3D Flat Scanner can perform strictly horizontal movement of the scanner. This can be essential in particular in confocal imaging or when working with certain liquid samples.

Tip Scanning    The distribution of light emanating from the edge of a waveguide can be better imaged by collection-mode tip scanning. In this case, the light is injected into the bottom of the waveguide through an inverted-microscope objective or an input fiber. The geometry of the light source and waveguide must be kept stationary throughout the measurement, and sample scanning would disturb the injection of light into the waveguide. Thus, tip scanning collection mode is preferred in this case and in similar experiments.

The MultiView 2000 TSLS™

• Integrate Alpha Step, AFM, and optical information
• Tip scanning
• Large sample stage
• Customer-specified stage sizes and accuracy

The MultiView 2000 TSCM™

• Tip scanning
• Add to any existing optical microscope, including UV confocal microscopes
• On-line viewing with lens and tip for imaging and calibration
• Resolve optical and AFM registration in semiconductor applications
• Ultra high-resolution thin film measurements
   
  

Controller Options

Additional System Options and Accessories

• Liquid Cell option for working in aqueous solutions in both NSOM and AFM modes
• Nano-chemical or gas delivery
• High vacuum and low temperature systems
• Environmental control

System Specifications

	Available Modes of Operation
AFM	AC Mode and all standard AFM modes of operation
Near-field Optical Imaging & Illumination	Transmission, Reflection, Collection, Illumination
Differential Interference Contrast and Phase Imaging	Reflection and Transmission
On-line Far-field Confocal with Raman and Fluorescence Spectral Imaging	Reflection and Transmission
Liquid Cell Operation (Optional: With beam bounce feedback attachment)	For AFM, NSOM and other SPM measurements in liquids with a completely free optical axis allowing for all modes of optical imaging including phase imaging. In addition to all standard silicon cantilevers, cylindrical glass cantilevers for AFM and NSOM operation are provided. Such cylindrical cantilevers are not damped by the liquid environment and permit AFM operation without Q control allowing for higher fidelity in AFM and NSOM liquid imaging.
Thermal Conductivity and Spreading Resistance Profiling	AC mode No Feedback Laser Induced Extraneous Carriers in Semiconductors (using optional tuning fork feedback module) The probes also can act as a nanoheater for heat induced point alterations upto 700oC which can be used for the induction of phase transitions or thermally induced chemistry.
NanoLithography	Software and hardware for correlation of the position of the AFM sensor for writing nanolithographic patterns. This includes patterning with Nanonics exclusive nanofountain pen nanochemical lithography package. The hardware and software also permit external triggers for either electrical pulses or optical pulses or other external sources in concert with the patterning operation.
NanoFountain Pen NanoChemical Nanolithography	Components for nanofountain pen nanochemical nanolithography liquid delivery for use with the Nanonics 3D lithography package and NanoChemwrite™ Software Package. The only System allowing for gas writing with a controlled environment chamber fully integrated into optical microscopy. Environmental chamber also permits controlled environments of gases or humidity for chemical or other writing tasks. Nanoheaters available for thermally induced chemical writing and near-field optical point light sources for optically induced chemical writing.
NanoIndentation	Application of MegaPascals of force, allowing exact positioning and controlled application of force with on-line analysis. Scripting of the nanoindentation pattern.
NanoManipulation	Placement and movement of probe for controlled placement of particles and other nanomanipulation tasks.
Environmental Control	Controlled environment chamber with full integration into an optical microscope. Also permits 100x 0.7NA viewing from below. Constant humidity capabilities: 5% - 95% with error of 0.2% Inlets for other substances for environmental controls, including additional gas inlet for the environmental control . Cooling to 4°C – Heating to 40°C
Sample cooling/heating	Ability to heat solid state samples up to 350 degrees centigrade and cool samples to -20 degrees centigrade using evacuated environmental chamber as above.
Other Modes of Operation	Refractive-Index Profiling in Reflection and Transmission
	SPM Scan Head Specifications
Sample Scanner	Piezoelectric Based Flat Scanner (3D Flat Scanner™) Height 7mm
SPM Scan Range	Up to 200 microns (X, Y and Z) sample scanning
Scanner Resolution	< 0.005 nm (Z) < 0.015 nm (XY) < 0.002 nm (XY) low voltage mode
Rough Positioning	Sample rough positioning: 6 mm rough positioning of sample via piezo electric 3D Flat Scanner
Feedback Mechanism	Tuning fork (Standard) Beam bounce Attachment (Optional)
Sample Geometries	Sample size:  Up to 16 mm standard                      Up to 34mm for upright microscope operation                      Unconventional Geometries: Hanging samples for edge profiling and other unconventional geometries possible
Probes	Specialized glass probes with exposed tip geometry and all forms of silicon cantilever probes can be used.
	Imaging Resolution
Far-field	Diffraction Limited
Optical	Optics providing 500 nm diffraction limited non-confocal operation
Confocal	200 nm
NSOM	100 nm on installation; 50 nm probes available
Topographic	Z noise 0.05 nm rms. X.Y lateral resolution: convolution of tip diameter & sample
Thermal	From 100 nm
Resistance	From 25 nm
	Thermal & Resistance Imaging
Temperature	350 ºC or greater, depending on sample to be investigated
Thermal	Unique exposed tip dual platinum nanowire probes fully insulated with glass coating: Thermal Sensitivity 0.01 ºC Measured Resistance Change per degree; 0.38 Ω/ºC
Resistance	Unique exposed tip platinum nanowire probes fully insulated with glass coating and allowing for coax geometry structures: Ultra high electro potential resolution Few tens of ohms contact resistance for probes <100nm Electrically stable & free from oxidation
	Electronics & Software
Control System	Integra Controller Specifications Supports various imaging modes including AFM (contact and non-contact), phase, error signal and NSOM. Up to 8 data channels can be read and imaged simultaneously. All ADCs are 16 bit and DACs have16-bit resolution. Image size continuously variable from 2x2 to 1024x1024 Inbuilt lock-in amplifier There are two alternative software packages available: Quartz Software Package Specifications: User friendly 32-bit Windows application available for Windows 95/98, NT and XP. Intuitive scan parameter setup Image and line profiles displayed in real time. 2-D and 3-D image rendering Extensive image processing options Comprehensive image analysis features including: cross section, particle analysis, fractal analysis and z-data histogram. Import data as Windows bitmaps and ACSII.  Export data as TIFF and Windows bitmaps and ACSII. LabView Software Package Specifications User friendly LabView SPM based software for PCI-7344 with the following specifications: AUX  Data acquisition Image and line profiles displayed in real time. Intuitive scan parameter setup Open Design enabling Customization by User and interfacing to other LabView modules. Nanonics Controller and software package based on Windows XP and Windows XP LabView based software package. Real time image display, image acquisition up to 8 channels. Full access to all signals and readily integrated with external signals from other sources. Analysis software including all standard image processing routines and 3D rendering including collages of multiple signals. Software modules available for spectral acquisition and analysis including Raman and fluorescence spectra, nanoindentation, nanolithography including NanoChemwrite™ Fountain Pen NanoChemistry™ software suite.
Data Acquisition	From 2x2 to 1024x1024 and multiple Z acquisition
Analog Lock-in	Provides quadrature output. Information is readily available on R/Ө and I/Q in output bandwidths of 15kHz (depending on DT card in use; the controller can give up to 100 kHz).
Frequency Synthesizer	Direct Digital Synthesizer (DDS) system for frequency and phase adjustment with 32-bit frequency determination and 20-bit phase determination. This system uses three independent generators. Two of these generators provide quadrature for lock-in processing and the third generator is used for exciting with an autophase algorithm. The system uses a clock frequency of 20 MHz with a stability of 5 ppm and provides frequency resolution of <5 mHz.
Amplitude	0 to 5 V p-p and maximum resolution of up to 0.2 mV Amplitude, Phase and Frequency of the oscillator can be controlled with 100 kHz updates.
X, Y, and Z High Voltage Outputs	-145V to +145V
	On-line Optical and Electron/Ion Optical Integration
Type	Far-field, Confocal Optics , micro-Raman; Scanning Electron Microscope (SEM) or Focused Ion Bean (FIB)
Integration	Free optical axis from above and below the sample for on-line optical or electron/ion optical characterization. Integration with all forms of optical microscopes including upright microscopes and upright microscope probe stations. Integration with all standard microRaman 180 degree backscattering geometry configurations, inverted microscopes and state of the art dual (4Pi) microscopes such as Nanonics unique dual microscope. All conventional far-field optical modes of operation are available, including phase imaging and differential interference contrast. NSOM with any optical microscope including: upright, inverted and dual. The completely free optical axis from above and below in all Nanonics MultiView Systems also allows for integration with (4Pi) dual microscopes for non-linear optical techniques including second harmonic and sum frequency generation microscopes, third harmonic imaging, coherent anti-Stokes Raman microscopes and stimulated emission depletion microscopy. All Nanonics Systems and all Nanonics Multiple Probe Systems are unique scanned probe microscopes with a completely free axis above the sample and thus can be integrated transparently into scanning electron microscopes including field emission SEM’s or focused ion beam systems.
Minimum Working Distance (WD) with High Numerical Aperture (NA) Optical Microscope Lenses	Upright Microscope or SEM or FIB:    Optical Objective: 100 X  with 0.75NA    Objective WD: 6.5 mm Inverted Microscope:    All available objectives including oil immersion optical objectives
Detectors	Photomultiplier Tube, Avalanche Photo Diode or InGaAs Detectors
Lasers	Variety of lasers can be used from deep UV to near-IR
Video system	On Line CCD video imaging
	On-line Spectroscopy Options
iHR320 Imaging Spectrometer	Features Up to 4 ports, 2 entrance, 2 exit Internal Filter Wheel (optional) Choice of 2, slits for high resolution or 7mm slits for high throughput Kinematic turret with easy access hatch Choice of CCD or Exit Slit on either exit port Easy CCD focus and alignment with external locking mechanism CCD flanges for resolution or imaging optimization Purge port for UV and NIR USB 2.0 with additional hub port
Specifications
Focal Length	320 mm
Aperture	f/4.1
Spectral Range	150 to 1500 nm with 1200 g/mm grating 150 nm to 40 mm with appropriate gratings
Grating Size	68 mm x 68 mm
Number of Gratings on Turret	3
Flat Field Size	30 mm x 12 mm
Resolution with Exit Slit and PMT	0.06 nm
Wavelength Accuracy	±0.20 nm
Repeatability	±0.075 nm
Spectral Dispersion	2.35 nm/mm
Magnification	1.1
Stray Light	5 x 10-4
Scan Speed	159 nm/sec
Step Size	0.002 nm
Computer Interface	USB 2.0 (USB 1.1 compatible)
Dimensions
Length	417 mm (16.4 in)
Width	422 mm (16.6 in)
Height	192 mm (7.6 in)
Optical Axis Height from the bottom of the instrument	98 mm (3.9 in)
Nominal Weight	20 kg (45 lb)

All specifications given for 1200 g/mm grating at 435 nm and are subject to change without notice.

Raman Spectroscopy Package for On-line Pixel by Pixel Integration of AFM & Raman

inVia Raman microscope

Standard Features  Research grade microscope Renishaw has selected Leica microscopes for incorporation within inVia Raman systems, ensuring inVia Raman microscopes have the high optical efficiency and high stability necessary for rapid, reliable operation. Precision grating stage The inVia Raman microscope's ultra-high precision diffraction grating stage, using built-in rotary encoders, and SynchroScan spectrum acquisition technology ensure your spectra are accurate and reproducible. Honeycomb baseplate The inVia Raman microscope's rigid lightweight baseplate with precision kinematic mounts results in a highly stable system that allows lasers to be exchanged with ease. Flexible sampling inVia Raman microscopes support many sampling accessories (fibre-optic probes, temperature control stages, etc.), maximising the range of samples that can be examined. UV excitation The inVia Raman microscope's multiple optical path design enables UV lasers to be used easily and efficiently, without compromising the performance of any visible or near-infrared lasers. Sensitivity Renishaw’s RenCam CCD detector, with its ultra-low noise, high sensitivity detector chips, and enhanced low noise level electronics, is ideal for the most demanding Raman spectroscopy applications. Fibre optic probes Renishaw’s fibre optic probes extend the range of measurement possibilities into application areas where the sample cannot conveniently be brought to the instrument. The inVia Raman microscope's integral optics permit fibre optic probes to be used easily, and with high optical efficiency.