Imaging a deep trench such as the one opposite is impossible with standard silicon AFM tips. The Nanonics deep trench probes together with the large scan range of the 3D FlatScan ™ makes these images possible for the first time. |
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10 x 10 micron AFM image of a 10 micron deep/2 micron wide trench (Z-range 10 micron) | |
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| The bottom of a deep trench |
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Nanonics deep trench probes make it possible to form images from the bottom of a deep trench of up to 1.5mm. |
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1 x 1 micron AFM image of the bottom of the deep trench (Z-range 100 nm) | |
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| Side wall image |
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Only the Nanonics 3D FlatScan ™ is able to scan in the X-Z plane to image features on the side of a deep trench |
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5 x 5 micron X-Z scan of the sidewall of the deep trench (Y-range 150 nm) | |
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