With the inclusion of embedded closed loop sensors, The Nanonics 3D Flat Scanner can return the sample (or tip during tip scanning) to a precise spot with an accuracy of 20 nm. This is unaffected by hysteresis, creep, non-linearity or aging of the piezoceramic.

Therefore The Nanonics 3D Flat Scanner with closed loop sensors can perform linearization of the scanner both on-line and off-line during a scan.

With the addition of a third z-axis sensor The Nanonics 3D Flat Scanner can perform strictly horizontal movement of the scanner. This can be essential in particular in confocal imaging or when working with certain liquid samples

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