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Figure 1:
A) CCD picture of FIB Etched Trenches.
B) CCD picture shows Nanonics’ AFM glass probe during AFM scan of deep trench structure shown in (A).
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Figure 2:
A) AFM 3D (60x60 microns) presentation of the FIB etched feature shows a deep trench imaged with AFM Nanonics’ glass probe.
B) 2D AFM image show a line crossing the trench for line profiling.
C) Topography line profile (presented in B) showing large Z height of ~30 microns.
- The above AFM image was obtained with the MultiView 1000TM SPM head.
- Nanonics' 3D Flat ScanTM stage allows for unprecedented large Z scans of up to 100 microns.
- Nanonics' unique glass probes with high aspect ratios and normal force sensing allows for scanning such complicated topographies.
WSxM software has been used for image processing of the pictures above: I. Horcas et al. Rev. Sci. Instrum. 78, 013705 (2007)
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