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SRAM after Chemical Mechanical Polishing
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| 12x12 micron AFM image: No structure is visible as CMP leaves the topography very flat |
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Reflection NSOM of the same region: NSOM is able to reveal clear structures due to differences in the refractive index
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All these images were produced using the The MultiView 1000™ |
| Image produced by Electrical Resistance Imaging |
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