Silicon NanoIndentation

 

 

Figure 1: NanoIndentation obtained on SiO2 thin layer in Si obtained with 50nm Berkovich Diamond tip.

A) AFM topographic image of a nanoindentation obtained with a load of 100µN.

B) Line profile crossing the nanoindentation areas shows a depth of 36.5nm.

 

C) AFM topographic image of a nanoindentation obtained with a load of 50 µN.

D) Line profile crossing the nanoindentation areas shows a depth of 15.08nm.

WSxM software has been used for image processing of the pictures above: I. Horcas et al. Rev. Sci. Instrum. 78, 013705 (2007)