FIB Trench

 

  

 

 

 

 

Figure 1:
A)
 CCD picture of FIB Etched Trenches.
B) CCD picture shows Nanonics’ AFM glass probe during AFM scan of deep trench structure shown in (A).

 

 
 

 


 

Figure 2:
A) 
AFM 3D (60x60 microns) presentation of the FIB etched feature shows a deep trench imaged with AFM Nanonics’ glass probe.
B) 2D AFM image show a line crossing the trench for line profiling.
C) Topography line profile (presented in B) showing large Z height of ~30 microns.

  • The above AFM image was obtained with the MultiView 1000TM SPM head.
  • Nanonics' 3D Flat ScanTM stage allows for unprecedented large Z scans of up to 100 microns.
  • Nanonics' unique glass probes with high aspect ratios and normal force sensing allows for scanning such complicated topographies.

WSxM software has been used for image processing of the pictures above: I. Horcas et al. Rev. Sci. Instrum. 78, 013705 (2007)