AFM Raman of Si SiO2

   

 

Online AFM/Raman images of an Si/SiO2 grid shows a high lateral resolution on the Raman map. Shown on the left is the topographic image; on the right is the online Raman map of the 520cm-1 band’s intensity.

  • Nanonics’ MultiViewTM SPM systems – with their 3D FlatScanTM scanners and cantilevered glass probes – provide a free optical axis for a friendly online combination of AFM and Raman spectroscopy using true confocal optical microscopes, including upright microscopes.
  • Online AFM/Raman allows for direct and true correlation between structural and chemical information of the inspected samples. In addition, it improves the Raman’s lateral resolution by removing out-of-focus light through the accurate maintenance of sample-objective distance using the AFM tip. Finally, online AFM/Raman corrects tilts caused by the normal tilting of samples.
  • Glass probes are critical for Si-based samples, to prevent any background caused by the tip, as in most standard AFM systems that use Si cantilevered probes.
  • A Tip & Sample-Scanning AFM system is ideal for this type of application, to obtain tip/laser positioning for accurate AFM/Raman correlation. Complete correlation is obtained, without the miss-matching that can occur due to the switching of microscope objectives.

Ideal Systems for this Application: