Strained Si Transistor

Strained Si Transistor

 Correlating Raman maps of Different Raman Bands with the AFM Topographic Image

 

AFM topographic image of a transistor comprising Si and strained Si. Online Raman mapping was performed at the marked points. Three selected spectra are shown below corresponding to Si and two levels of strained silicon.

 

 
     

Raman spectrum of the green marked circle shows the 501cm-1 strained silicon band.

Raman spectrum of the red marked circle shows the 509cm-1 strained silicon band.

Raman spectrum of the blue marked circle shows the 520cm-1 silicon band.

     

Online Raman map of the strained silicon 501cm-1 band’s intensity obtained in full correlation of the transistor AFM image above.

Online Raman map of the strained silicon 509cm-1 band’s intensity obtained in full correlation of the transistor AFM image above. The map show a different level of strain at differennt locations on the transistor.

Online Raman map of the silicon 520cm-1 band’s intensity obtained in full correlation of the transistor AFM image above.

     

Collage AFM/Raman map shows the 3D transistor’s topography overlapped with the 501cm-1 Raman band’s intensity.

Collage AFM/Raman map shows the 3D transistor’s topography overlapped with the 509cm-1 Raman band’s intensity.

Collage AFM/Raman map shows the 3D transistor’s topography overlapped with the 520cm-1 Raman band’s