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AFM Probes
Optical Fiber AFM Probes
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Hard to Achieve Force Constants and Resonance Frequencies
Electrical Probes
NanoFountainpens™ for Gas or Chemical Delivery
Deep Trench Probes
Nanonics uses a patented unique technology to create cantilevered fiber probes that enables Deep Trench imaging.  For example, a cantilevered AFM tip can be specially designed to probe inside a trench that is 1.5 mm deep and only 100µm wide.

In addition, Nanonics probes for other types of imaging, such as NSOM and electrical/thermal, can be designed as deep trench probes, giving these imaging modalities access to a wide range of surface topographies.		  


Deep trench Probe lying across 150µm lines




Tips with high aspect ratios can easily be manufactured using glass pulling techniques. AFM tips (including Deep Trench Probes) with aspect ratios up to 10:1 are available. These probes have tip angles of 6°.


Imaging a deep trench such as the one opposite is impossible with standard silicon AFM tips. The Nanonics deep trench probes together with the large scan range of the
3D FlatScan™ makes these images possible
for the first time.		  

10 x 10 micron AFM image of a 10 micron deep/2 micron wide trench (Z-range 10 micron)

     

 
The bottom of a deep trench		    


Nanonics deep trench probes make it possible to form images from the bottom of a deep trench of up to 1.5mm.
 

1 x 1 micron AFM image of the bottom of the deep trench (Z-range 100 nm)

     

 
Side wall image		    


Only the Nanonics
3D FlatScan ™ is able to scan in the X-Z plane to image features on the side of a deep trench.
 

5 x 5 micron X-Z scan of the sidewall of the deep trench (Y-range 150 nm)



Deep Trench Probe Specifications
Tip Diameter >10 nm
Tip Length 30 µm - 500 µm
Cantilever Height 500 µm - 1500 µm
Cantilever Length 300 µm - 1000 µm
Force Constant from below 1N/m to 20 N/m
Resonant Frequency >390 kHz


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