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The image below was obtained using Nanonics' MultiView systems with sample scanning using a Nanonics deep trench AFM probe in intermittent contact mode. The combined effect of the high aspect ratio of Nanonics probes and 100-micron piezo Z range scanner yields high-resolution inverse deep trench images. Imaging of such deep trenches is impossible using standard silicon AFM tips.
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CCD image of razor edge |
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AFM Imaging of a razor blade sample
(Z: 64.5μm X: 39.7μm )
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The razor blade image represents an inverse of a deep trench. Typically, deep trench probes reach into topographical grooves. Here, in contrast, the probe moves down the sides of the razor blade edge.
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SEM image of the deep trench probe |
Shown above is an SEM image showing a Nanonics deep trench probe with an aspect ratio of 30:1. When necessary, Nanonics' specialized deep trench probes can reach depths of 1.5mm. Imaging of deep trenches, such as the one above, is impossible with traditional silicon AFM tips, where the low aspect tip ratio prevents deep trenching.
This overhead view (below) of the razor shows the plateau at the sample edge.
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Overhead view of razor |
The graph below records the line profile of the image above. The width of the plateau is 105nm.
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Line profile of razor scan |
Below are just a few examples of Nanonics' inverted deep trench images:
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