AFM SEM FIB Applications
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Fast SEM Scanning
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AFM Monitoring of FIB etching
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Material Contrast
in a SEM/FIB
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Probe Integrity
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Deep Trench Profiling
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Side Wall Imaging
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Cathodoluminescence
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SPM Imaging with
NanoToolKitTM probes
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Resolving SPM Problems
Online AFM/SEM/FIB integration solves problems of scanning speed of SPM. SPM scans at a snail's speed compared to an FIB or SEM. Taking advantage of this fast speed, SEM allows for rapid SPM probe placement in a large field of view provided by the SEM and available with the exposed probes.
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Exposed AFM probe shown within the SEM field of view
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AFM 3D Functional Monitoring of FIB etching
On the other hand, AFM/SEM/FIB integration overcomes SEM/FIB problems of monitoring depth or Z topographies of an etched area performed by the FIB. The ultra-sensitivity of the AFM allows for precise monitoring down to sub-nanometers 3D functional imaging of etching affected by the FIB.
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FIB etching indicated by red arrow
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3D AFM image of the etched area above
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Height profile of the etched area (green line on left image)
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Material Contrast in a SEM/FIB
Tuning fork AFM allows for new directions in material contrast with FIB etching. Amplitude signal of the tuning fork, in phase feedback mode, provides Elasticity monitoring of the imaged features.
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(Left): A snap shot of AFM imaging of Copper feature on Oxide surface presented through an SEM image. Transparent optical axis of glass probes allows free electron axis for viewing and accurate positioning of the AFM tip. (Right): Elasticity image performed trough Amplitude signals which show different level of signals on different materials. The softer (Copper) provides lower amplitude.
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Probe Integrity - Processing & Repair
SEM allows for online monitoring of AFM probe/tip characteristics. The following SEM images show the probe behavior and the tip characteristics under high pressing on the sample with large setpoint.
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SEM image shows a high pressing of an AFM probe (mounted on tuning fork with normal force sensing) with large sepoint.
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SEM image of the probe after retraction
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High resolution SEM image shows the tip end after the retraction. (bar is 50nm)
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Furthermore, FIB adds unique functionalities if tip probe integrity such as modifying the AFM tip as shown in the following pictures.
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Silver paint attached to the end of the tip
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Cleaning the silver paint at the end of the tip by FIB
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Deep Trench Profiling
Trench profiling is a must for FIB etching for monitoring quality of the etching. Standard AFM systems fail in profiling deep trenches due to limitations of Z range and tip's aspect ratio. Nanonics SPM systems provide large Z range of up to 170 microns and cantilevered glass probes with high aspect ratio.
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Nanonics probes with high aspect ratio and large Z range are ideal for deep trench profiling.
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3D AFM image shows deep trench's topography.
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Side Wall Imaging
Further to deep trench profiling, Nanonics SPM systems integrated inside SEM/FIB allows other unique capabilities such as side wall imaging. Side wall imaging enhances SEM/FIB with additional imaging perspectives.
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Nanonics probes with high aspect ratio and large Z range are ideal for side wall imaging.
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Side wall AFM imaging
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Cathodoluminescence
Nanonics SPM systems are provide unique solutions for near-field imaging with cantilevered fiber probes. Super-resolution near-field optical imaging in a SEM with topographically correlated cathodoluminescence is available now in AFM/SRM/FIB integrations.
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Near-field Cathodoluminescence from a GaN nanowire under ion beam excitation inside an SEM chamber. On-line AFM (left) and NSOM (middle) images obtained in collection mode. The NSOM image shows an evanescent light decay along the nanowire and light distribution at the nanowire output. Collage AFM/NSOM is shows on right image.
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NanoToolKitTM Probes
Variety of Nanonics cantilevered probes with exposes ion/electron axes are suitable for SPM/SEM/FIB integrations. Among these are Electrical/Thermal/NSOM/nano-heaters and other functional probes. Furthermore, these probes are suitable for multiprobe SPM imaging and nanomanipulations
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