|
Correlating Raman maps of Different Raman Bands with the AFM Topographic Image
|
|
AFM topographic image of a transistor comprising Si and strained Si. Online Raman mapping was performed at the marked points. Three selected spectra are shown below corresponding to Si and two levels of strained silicon.
|
|
|
|
|
|
|
Raman spectrum of the green marked circle shows the 501cm-1 strained silicon band.
|
Raman spectrum of the red marked circle shows the 509cm-1 strained silicon band.
|
Raman spectrum of the blue marked circle shows the 520cm-1 silicon band.
|
 |
 |
 |
|
Online Raman map of the strained silicon 501cm-1 band’s intensity obtained in full correlation of the transistor AFM image above.
|
Online Raman map of the strained silicon 509cm-1 band’s intensity obtained in full correlation of the transistor AFM image above. The map show a different level of strain at differennt locations on the transistor.
|
Online Raman map of the silicon 520cm-1 band’s intensity obtained in full correlation of the transistor AFM image above.
|
|
|
|
|
|
Collage AFM/Raman map shows the 3D transistor’s topography overlapped with the 501cm-1 Raman band’s intensity.
|
Collage AFM/Raman map shows the 3D transistor’s topography overlapped with the 509cm-1 Raman band’s intensity.
|
Collage AFM/Raman map shows the 3D transistor’s topography overlapped with the 520cm-1 Raman band’s intensity.
|
|
