Awarded the R&D 100 2007 Award Nanophotonics Meteorology Platform
Nanonics carries nanophotonics characterization to new heights with The Optometronic 4000TM. Photonic and plasmonic characterization today demands the ability to integrate multiple functions transparently and with modularity on one platform. The Optometronic 4000TM combines Nanonics' revolutionary Multiprobe near-field optical and atomic force capabilities with Nanonics' state of the art lensed fibers and highly compact lensed fiber NanoManipulators, branding the Optometronic 4000TM with the mark of excellence and innovation that is Nanonics. Optometronic 4000TM is an ideal nanophotonics meteorology platform for nanocharactarization and manipulation for variety of nanophotonics applications such as lasers, photonic waveguides, solar cells, hybrid photonics and plasmonic devices, etc.
Key Features
Design
Applications
Online Integrations
Specifications
Enter a new multiprobe world of combined far-field and near-field optical characterization.
The Optometronic 4000TM offers integrated optical and structural characterization of photonic and nanophotonic components and devices for state-of-the-art silicon nanophotonics, photonics waveguides, plasmonics, photonic band gap materials and metamaterials. The Optometronic 4000TM features a variety of forefront directions in passive and active photonic devices and materials.
Optometronic 4000TMOne Probe, two Nanoaligners
Optometronic 4000TMTwo Probes, two Nanoaligners - top view
A COMPLEX OF INNOVATIONS
Modular and Upgradable - A unique platform with integrated NanoAlignment and NanoOptical characterization
On-line Multiple SPM Near-Field Optical (NSOM) & Apertureless Near-Field Optical (ANSOM or sSNOM) Probes and Nanoaligners
- Multiple SPM and near-field optical probes for apertured NSOM and apertureless (ANSOM or sSNOM) on-line - Mix and match nanoprobes with nanoaligners
Transparent Optical Integration - Upright microscopes
- Inverted microscopes
- Dual 4pi configurations (illumination from above and below)
- Side illumination with nanoaligned lensed fibers
- All near-field modes: transmission/reflection/collection/ illumination
A Complex of Online Optical Measurements
- True near-field /far-field M2
- On-line all near-field modes of NSOM, ANSOM and sSNOM operation with multiple probes
- Bridge near-field and far-field characterizations with ease
A Complex of Measurements Protocols
- Picoamp electrical measurements
- Ultrasensitive thermal measurements
- Reconfigurable electrical, thermal and optical interconnects with SPM or nanoaligner control
- Full structural/thermal/electrical and optical correlation with online SPM and near-field/far-field optics
Ultra Stable Platform: Full Isolation from Online Noise Sources
- FromFemtosecond lasers - From visible and Infra Red spectrometers, CCD and InGaAs
NanoToolKitTM of Multifunctional Probes & Lensed Fibers
- Highly exposed tip glass cantilevered AFM and NSOM apertureless and scattering probes
- Multi-functional SPM probes for thermal, electrical and chemical nanodelivery
- All probes are optically and multiprobe friendly
- Highly compact lensed fiber illumination and collection
Tuning Fork Feedback - Ultra sensitive feedback with high Q-factors
- Improved imaging quality
- No interference due to optical feedback
Unprecedented 130 µm Piezo Z Range
Tip or Sample Scanning & Manipulation
MultiProbe NanoManipulation
The Optometronic 4000TM Integrates Nanonics' Innovations
1. The Solution to the Scanning Problem: Optically Friendly 3D Flat ScanningTM
2. Optically Friendly Cantilevered Optical Fiber Probes that Do Not Obscure the Optical Axis
3. Normal Force Tuning Fork Feedback
1. The Solution to the Scanning Problem: Optically Friendly 3D Flat ScanningTM
3D Flat ScanningTM technology was developed to enable optically friendly SPM scanning systems. The Flat ScannersTM are based on the same scanning mechanism of all AFM piezo scanners. However, four piezos are used in a patented geometry to create a free optical axis.
3D FlatScanTM Scanning Stage cylindrical Piezo Tubes
Tip and sample scanning capabilities
The SPM scanning systems also provide a large scanning range of up to 100 microns, including the Z axis. A large Z range connects well with confocal imaging.
Flexible scanner design and geometry with a 7 mm thin plate.
Inertial motion and controlled piezo offsets for rapidly finding regions of interest in a sample with the optical microscope.
3D FlatScanTM Stages are Ideal for Photonics/Plasmonics Applications:
- Free Optical Axis: From top and bottom for transparent integration with optical microscopy
- Tip and Sample Scanning: With many photonics/plasmonics applications, moving the sample would change the optical alignment with the illumination light or would alter the light propagation through the sample. Tip-Scanning mode effectively addresses these issues with independent X,Y and Z scanning of the tip. Furthermore, sample scanning provides flexible positioning accuracy through controlled voltage offsets to facilitate sample-tip accurate alignment.
- Non-Conventional Sample Size and Geometry: The 7mm thin stage with a >20mm opening allows for mounting large samples/wafers including hanging positions.
2. Optically Friendly Cantilevered Optical Fiber Probes that Do Not Obscure the Optical Axis
Nanonics has developed solutions to both the probe and the scanning problems of standard AFM systems. One solution utilizes a cantilevered transparent optical fiber probe. All such probes have their tips exposed to the optical axis and the axis is kept completely free for a variety of optical microscopic protocols that require a free optical axis.
Free transparent optical axis of glass probes vs obscured axis of standard Si probes
Glass probes are optimal for multiprobe operation.
Problematic geometry for multiprobe operation with Si probes.
While typical probes do not permit the probe tips to come within close proximity of one another, Nanonics offers optically friendly glass based probes that allow for a close approach of the probe tips - a critical feature of multiprobe imaging systems. Nanonics' exposed probe technology permits the approach of two probes to within 10 nm, with independent scanning of each probe.
(Left): Nanonics' patented bent cantilevered glass probe. (Middle): Online dual probes in contact with AFM feedback (side view). (Right): Online four probes in contact with AFM feedback (top view 500x magnification)
Cantilevered Fiber Probes are Ideal for Photonics
They combine the ease of normal force AFM control with the waveguiding nature of fiber probes.
They allow for near-field scanning of the probe, independent of sample scanning.
They permit excellent collection mode NSOM which is critical in photonic device characterization.
They transparently integrate with standard light wave characterization equipment.
3. Normal Force Tuning Fork Feedback
Tuning fork feedback facilitates a "friendly" geometry of the AFM feedback mechanism. Unlike the beam bounced feedback with laser, photodiode and bouncing optics, the tuning fork allows for online multiprobe feedback with no geometric complexity.
The MultiView 4000TM employs the ultimate in SPM feedback technology. Normal force tuning fork technology with high Q factor phase feedback is used to permit unprecedented control of the probe tip/sample separation. Tuning forks in normal force mode with phase feedback not only permit the best AFM imaging available today but in addition, there are no user adjustments needed with this kind of feedback mechanism. This allows for ease of operation with the ultimate in AFM resolution, better than any beam bounce technology. Furthermore, there is no feedback laser interference, for example, when working with semiconductor devices or fluorescent materials.
Nanopipette probe mounted on tuning fork
NSOM probe attached to tuning fork operating in normal force mode 633nm laser is emitted through a small aperture of 100nm
Two Probes, two NanoAligners: Schematic
Two Probes, two NanoAligners: Free optical axis
One Probe, two NanoAligners
One Probe, two NanoAligners: Upright Optical Microscope
Mix and match Probes and NanoAligners for variety of applications
All NSOM Modes
Waveguides & Optical Resonators
Plasmonic Structures
Photonic Band Gap Devices
3D Near-field/Far-field Profiling
MultiProbe
Nanolithography/Nanomanipulation
Active Devices Characterization
Refractive Index Profiling
Interferometric Detection
All NSOM Modes
The Optometronic 4000'sTM unique design permits transparent optical integration with upright, inverted and 4pi dual optical microscopes, allowing for illumination and collection of light from above and below, as well as side illumination with nanoaligned lensed fibers. This configuration effectively bridges near-field and far-field optics for a variety of imaging and nano-manipulation modes.
Optical Resonators and Waveguides Characterization
(Left) Side coupling of IR light onto Si waveguide with lensed fiber
(Right) Side coupling of IR light onto Si waveguide with Optometronic 4000TM lensed fiber NanoAligner
AFM topographic image of photonic waveguide
Online NSOM image (collection mode of evanescent light) of waveguide showing resonant propagation along waveguide
3D AFM/NSOM collage presentation
Full View from Top for Alignment
(Left) Coupling IR light onto Si waveguide with lensed fiber mounted on NanoAligner. (Right) Top view from upright microscope showing NSOM probe scanning resonant structure at Si waveguide.
AFM image (left) of resonant structure of waveguide shown above. NSOM evanescent collection above resonant structure (right).
Vertical Waveguides
The 3D FlatScanTM flexible geometry allows for the vertical mounting of waveguides. The dual optical microscope provides a full view for coupling the light in and out of the waveguide. The system offers high flexibility and accuracy of positioning and alignment of the sample relative to the illumination source, due to tip and sample scanning capabilities. It also offers high flexibility and accuracy of postioning and alignment of the NSOM probe, relative to the output of the waveguide.
Complete optical access for top and bottom view of the output and input of a vertical waveguide - viewed with a dual optical microscope
Investigating vertical waveguides with far-field injection of light from the bottom, and near-field collection of output from the top
AFM/NSOM collage image showing near-field light distribution at the waveguide output, fully-correlated with the topography of the waveguide
Spatially correlating the launching of light and the resulting emitted mode structure.
Top view (CCD image) of near-field launching of light by NSOM probes in illumination mode to a waveguide
Far-field emitted modes structure at the output of the waveguide (CCD picture
viewed by the lower optical microscope) correlated with various input positions of the NSOM probe
Nanonics' system [S. A. Maier, Nature Mater. 2 (2003) 229-32] employed the illumination mode to selectively illuminate 50 nm silver balls separated by 50 nm, and to measure the plasmonic energy transfer to a fluorescent bead in the plasmonic waveguide.
Relative Enhancement of Plasmonic Holes Nanoarray Structure
Nanoholes array formed on a gold surface (gold was thermally evaporated on top of a glass cover. The gold was milled with a focused ion beam). Isolated holes of the same diameter were produced aside for comparison.
Holes nanoarray structure scheme
SEM image shows holes of an array produced by FIB on gold surface and separate holes outside the array
Close-up image shows a 145nm diameter hole and 330nm periodicity of the nanoarray
Experimental Setup
The sample is illuminated with a 532 nm laser from the bottom with linear polarization in the x direction.
The transmitted light is collected in the near-field by an NSOM collection probe (150 nm diameter).
An important experimental constraint is that the sample has to stay in the same place so that the tip is scanning the sample.
Enhancement of Light Transmission
(Left) AFM global scan of the pattern showing the holes in and out of the array
(Middle) NSOM-correlated image performed in collection mode shows the light distribution of the holes (Right) NSOM image with stretched optical intensity shows the relative enhancement of the nanoarray's light distribution compared to that of the isolated single holes. (The large single hole at the lower left is used as a reference point.) The stretched image shows a 40x enhancement of light transmission.
Localized Plasmons via NSOM/Topography Direct Correlation
NSOM collection mode image shows light distribution from an array of 136nm holes and spaces in gold (shown above). Arrow indicates polarization of the incident light with plasmonic propagation at 900 to the polarization. This array shows extraordinary transmission (EOT) of 40x a single 136 nm aperture.
3D collage of above NSOM image correlated with AFM topography. Distribution of light is more intense at higher metal lines than in apertures.
The array was designed to support the (0,1) SP mode, i.e. the SPs propagate in the y direction. The significant blur in the y direction is the expression of the SP propagation in that direction.
Plasmonic Waveguides on a Launching Pad
Far-field excitation via diffractive grating for light-coupling to a plasmonic waveguide with the 50x objective of an upright optical microscope is shown below. Near-field collection of propagated plasmons with an NSOM probe are shown as AFM/NSOM images.
Top view of NSOM probe approaching launching pad with diffractive grating for far-field coupling of light (at marked point)
AFM topographic image of launching pad
NSOM image of surface plasmons generated on launching pad
2D and 3D Photonic Band Gap crystals (Photonic Crystals) possess unique optical properties in a variety of optical and electroptical devices. The Optometronic 4000TM, with its near-field and far-field manipulation and imaging capabilities, allows for the complete investigation of these devices.
AFM close-up imaging of 3D periodic composition (250nm periodicity) of dielectric colloidal photonic structure. (Left) 20umx20um; (Middle) 8umx8um; (Right) 3umx3m.
3D PBG Wave-Guiding
AFM 15x15µm (left) of 3D PBG and correlated NSOM image (middle) shows "trapped" light between PBG slits. (Right) 3D AFM/NSOM collage image.
Mach-Zehnder PBG
AFM image (left) of Mach-Zehnder Interferometer PBG integrated into Si waveguide. NSOM image (right) captured in reflection mode. Both images indicate high reflectivity along the PBG defect.
The combination of tip and sample scanning capabilities allows the Optometronic 4000TM to perform 3D NSOM imaging, starting from the Near-field range and continuing up to microns on the surface, while taking advantage of the large (100
µm) Z range of the 3D-FlatScanTM scanning stages.
AFM/NSOM imaging (collection mode) of fiberlens sample illuminated with 532nm laser (left). AFM image of tip surface of fiberlens (right). NSOM image in collection mode shows 532nm laser output from fiber lens at Near-field range. (Below) AFM/NSOM collage image
X-Z scan of above fiberlens shows optical Z distribution of focused light emerging from fiberlens. Scan was obtained with the Smart Z Profiler, starting from Near-field and rising up to 20 microns above the surface.
Optical distribution of various Z cross sections obtained at different Z heights above surface. Green bold plot indicates highest intensity as well as smaller spot size of beam that occurs at focus plan, 9 microns above surface level.
The Optometronic 4000TM allows for unique protocols utilizing multiprobe imaging, and manipulation capabilities such as Nano-Pump-Probe of Near-field illumination and Near-field collection; online AFM and thermal/electrical imaging; online AFM and Nano-Indentation; and online AFM and Nanolithography.
Nano-Pump-Probe
Single mode optical fiber illuminated with Optometronic 4000TM NSOM probe, and second probe for NSOM imaging at fiber's output
Online AFM (left) and NSOM image obtained with output of fiber in configuration above. (Right) AFM/NSOM 3D collage image
Exciting and Measuring Surface Plasmon Propagation (SPP) with Two Probes
Two NSOM probes of the Optometronic 4000TM perform a unique Nano-Pump-Probe protocol for effective surface Plasmon Near-field excitation and Near-field collection of SPP with a second probe.
AFM image of gold strip excited with NSOM probe
NSOM image of gold strip captured with second probe, starting from excitation point
Photonic Band Gap (PBG) crystals integrated with photonic waveguides play an important role in modifying the distribution of the propagated light. A design defect within the PBG would affect the refractive index and change its optical properties. Fountain Pen NanoLithography (FPN) with Nanonics' cantilevered AFM nanopipettes allows for the creation of selective and dynamic defect generation through the controlled and localized deposition of various materials within the PBG matrix. The Optometronic 4000TM with its multiprobe capabilities allows for the deposition of materials with a first probe and online imaging with a second probe.
The Optometronic 4000TM allows for the characterization of active devices such as semiconductor lasers. Below are AFM and NSOM images showing the topography and light distribution at the output of a semiconductor laser with different injection currents.
3D topography presentation of semiconductor output
3D NSOM presentation shows light distribution at laser output
3D AFM/NSOM collage of above images shows light distribution executed with 22.5mA injection current
3D AFM/NSOM collage image shows optical and topography alterations with higher injection current of 50mA
Mode Distribution of Quantum Wire Laser
The images below show the spectroscopic characterization of a Quantum Wire Laser with an NSOM probe. The NSOM images were captured by a spectrograph detector at 805.0nm and 805.8nm. The small wavelength change (GHz alteration) caused a large change in the distribution of light.
NSOM images show light distribution of Quantum Wire Laser at wavelengths of 805.0nm (left) and 805.8nm (right)
Correlated Optical and Thermal Imaging of p-n Junction
The online MultiProbe capabilities of the Optometronic 4000TM allow for the correlation of light distribution with thermal characteristics.
NSOM (left) and thermal (right) multiprobe imaging of semiconductor laser
The Optometronic 4000TM offers unique solutions for Refractive index Profiling through the combination of online AFM with Differential Interference Contrast (DIC). This online measurement provides direct correlation between the structural information and the optical properties of the investigated sample. In addition, out-of-focus light is eliminated through the Z height adjustment of the AFM Z position, improving the lateral resolution of the DIC imaging.
Refractive Index measurements are critical for many photonic waveguide applications where errors in the refractive index cause errors in the guiding of light and the distribution of the optical light field. These waveguide are primarily opaque and require a true confocal upright microscope. The Optometronic 4000TM 's free optical access is ideal for this application.
Deconvolved refractive index image of core of commercial Fiber Bragg Grating. Image was obtained with help of phase restoration routine developed at Nanonics, provided with Nanonics refractive index
Interferometric measurements such as Heterodyne or Homodyne detection methodologies provide further information about the device undergoing tests. In the case of PBG crystals, interferometric measurements allow for accurate optical measuring of the Near-field optical amplitude and phase of the propagated field.
Interferometric setup for phase measurement of propagated light in PBG (Tortora et al, MicroscopyOpt. Lett. 21, 28852887 [2005]).
PBG crystal SEM image (left) used in above setup. NSOM image (middle) shows light intensity as light propagates along PBG defect. Phase distribution over PBG is presented in right image.
For more information about Heterodyne detection, click here.
Free optical axis for transparent optical integration with true confocal optical microscopes:
- Upright microscopes
- Inverted microscopes
- Dual 4pi configurations (illumination/collection from above & below)
- Power full objectives of high magnification (100x) and large NA (0.75 from top). Waters immersion objectives from top are also included.
- All Near-field modes and far-field modes: Transmission/Reflection/Collection/ Illumination
One Probe-Two NanoAligners: Integration with upright optical microscope
Two Probes - Two NanoAligners: Integration with upright optical microscope
Two Probes- Two NanoAligners : Integration with dual optical microscope
Complete integration with standard photonic stations for light coupling in/out
Complete integration with optical devices such as fibers, polarizers, analyzers and other optical setups.
Detectors are provided throughout many spectral regimes including the critical telecommunications region of the spectrum and full integration with standard light wave measurement technology
Flexible software and hardware access for integration with nanoalignment and test measurements such in Telecom, Lasers, CCDs and various detectors.
Flexible integration of Optometronics 4000TM with standard nanoalignement and test measurements.
Exceptional quality of lensed fiber for light coupling in/out mounted on piezo controller nanoaligners.
Customized spot size and working distance.
Various types of Nanonics lensed fiber and lensed fiber probes providing different spot size, NA and other unique characteristics both for imaging and optical manipulation
Lensed fiber mounted on Optometronics 4000's NanoAligner for side coupling of light into waveguide.
Lensed fiber Scheme
AFM/NSOM collage image (collection mode) shows a lensed fiber topography and light distribution at the nearr-field range.
3D Profiling (XZ) of lensed fiber showing a 9um focus distance above the lens surface.
Optometronic 4000TM allows for full SPM operation in liquid media of flexible Liquid Cells for variety of NanoBioPhotonic applications.
MultiProbe operation inside liquid cells
Complete optical axis for near-field, far-field and fluorescence measruments.
Tuning fork AFM based feedback for ultrahigh sensitivity without optical interference.
Tuning Fork Feedback of the Optometronics 4000TM operated in liquid cell with free optical axis. Upright optical microscope with water immersion lenses are used in such configurations.
NanoFountainPen delivery of chemicals and gases; Near-field photolithography; and other conventional means of nanolithography such as electrical oxidation etc; with on-line analysis with an additional probe
NanoIndentation
Application of MegaPascals of force, allowing exact positioning and controlled application of force with on-line analysis with an additional probe.
All the above modes of operation are provided fully integrated with on-line AFM imaging.
SPM Scan Head Specifications
Sample Scanner
Piezoelectric Based Flat Scanner (3D Flat Scanner™)
Height 7mm
Probe Scanner
Up to 4 independently controlled piezoelectric Flat Scanners (3D Flat Scanner™) modules
Height 7mm
SPM Scan Range
30 microns (XYZ) for each probe scanning module
100 microns (XYZ) sample scanning only
130 microns (XYZ) with sample and probe scanning
160 microns (XY) with sample and two probe scanning
Scanner Resolution
z: 0.002 nm
XY: 0.005 nm
Rough Positioning
Sample rough positioning:XY motorized stage – range 5mm – resolution 0.25 micron Tip rough positioning: XY motorized stage – range 5mm – resolution 0.25 micron
Z motorized stage – range 10mm – resolution 0.065 micron
Sample size: Up to 16 mm standard
Up to 34mm for upright microscope operation
Up to 55mm without sample scanning Custom sample sizes up to 200mm also available
Unconventional Geometries: Hanging samples for edge profiling and other unconventional geometries possible
Unique exposed tip platinum nanowire probes fully insulated with glass coating and
allowing for coax geometry structures:
Ultra high electro potential resolution.
Few tens of ohms contact resistance for probes <100nm.
Electrically stable & free from oxidation.
Electronics & Software
Control System
Integra Controller Specifications
Supports various imaging modes including AFM (contact and non-contact), phase, error signal and NSOM
Up to 8 data channels can be read and imaged simultaneously.
All ADCs are 16 bit and DACs have16-bit resolution.
Image size continuously variable from 2x2 to 1024x1024
Inbuilt lock-in amplifier There are two alternative software packages available: Quartz Software Package Specifications:
User friendly 32-bit Windows application available for Windows 95/98, NT and XP
Intuitive scan parameter setup
Image and line profiles displayed in real time
2-D and 3-D image rendering
Extensive image processing options
Comprehensive image analysis features including: cross section, particle analysis, fractal analysis and z-data histogram
Import data as Windows bitmaps and ACSII. Export data as TIFF and Windows bitmaps and ACSII. LabView Software Package Specifications:
User Friendly LabVIEW SPM based software for PCI-7344 with the following specifications:
AUX Data acquisition
Image and line profiles displayed in real time
Intuitive scan parameter setup
Open Design enabling customization by user and interfacing with other LabVIEW modules Nanonics Controller and software package based on Windows XP and Windows
XP LabView based software package. Real time image display, image acquisition up to 8 channels. Full access to all signals and readily integrated with external signals from other sources. Analysis software including all standard image processing routines and 3D rendering including collages of multiple signals.
Software modules available for spectral acquisition and analysis including Raman and fluorescence spectra, nanoindentation, nanolithography including
NanoChemwrite™ Fountain Pen NanoChemistry™ software suite.
Data Acquisition
From 2x2 to 1024x1024 and multiple Z acquisition
Analog Lock-in
Provides quadrature output. Information is readily available on R/? and I/Q in
output bandwidths of 15kHz (depending on DT card in use; the controller can
give up to 100 kHz).
Frequency Synthesizer
Direct Digital Synthesizer (DDS) system for frequency and phase adjustment with
32-bit frequency determination and 20-bit phase determination. This system uses
three independent generators. Two of these generators provide quadrature for
lock-in processing and the third generator is used for exciting with an autophase
algorithm. The system uses a clock frequency of 20 MHz with a stability of
5 ppm and provides frequency resolution of <5 mHz.
Amplitude
0 to 5 V p-p and maximum resolution of up to 0.2 mV
Amplitude, Phase and Frequency of the oscillator can be controlled with 100 kHz updates.